Format

Send to

Choose Destination
Appl Opt. 2005 Jul 1;44(19):3937-44.

High-precision absolute distance and vibration measurement with frequency scanned interferometry.

Author information

1
Department of Physics, University of Michigan, Ann Arbor, Michigan 48109-1120, USA. yhj@umich.edu

Abstract

We report high-precision absolute distance and vibration measurements performed with frequency scanned interferometry using a pair of single-mode optical fibers. Absolute distance was determined by counting the interference fringes produced while scanning the laser frequency. A high-finesse Fabry-Perot interferometer was used to determine frequency changes during scanning. Two multiple-distance-measurement analysis techniques were developed to improve distance precision and to extract the amplitude and frequency of vibrations. Under laboratory conditions, measurement precision of approximately 50 nm was achieved for absolute distances ranging from 0.1 to 0.7 m by use of the first multiple-distance-measurement technique. The second analysis technique has the capability to measure vibration frequencies ranging from 0.1 to 100 Hz with an amplitude as small as a few nanometers without a priori knowledge.

PMID:
16004038

Supplemental Content

Full text links

Icon for Optical Society of America
Loading ...
Support Center