Format

Send to

Choose Destination
Appl Opt. 2004 Aug 10;43(23):4584-9.

Femtosecond pulsed laser micromachining of glass substrates with application to microfluidic devices.

Author information

1
Optical Sciences Center, University of Arizona, Tucson, Arizona 85721, USA.

Abstract

We describe a technique for surface and subsurface micromachining of glass substrates by using tightly focused femtosecond laser pulses at a wavelength of 1660 nm. A salient feature of pulsed laser micromachining is its ability to drill subsurface tunnels into glass substrates. To demonstrate a potential application of this micromachining technique, we fabricate simple microfluidic structures on a glass plate. The use of a cover plate that seals the device by making point-to-point contact with the flat surface of the substrate is necessary to prevent the evaporation of liquids in open channels and chambers. Methods for protecting and sealing the micromachined structures for microfluidic applications are discussed.

PMID:
15376436
DOI:
10.1364/ao.43.004584

Supplemental Content

Full text links

Icon for Optical Society of America
Loading ...
Support Center