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J Opt Soc Am A Opt Image Sci Vis. 2004 Jul;21(7):1186-91.

Diffraction-based solid immersion lens.

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Carl Zeiss Jena GmbH, Carl-Zeiss-Promenade 10, 07745 Jena, Germany.


A solid immersion lens based on diffraction (dSIL) is proposed as an alternative to the conventional design based on refraction. A design analogous to a Fresnel zone plate is derived in accordance with the Huygens-Fresnel principle. Fabrication of a binary dSIL is achieved by electron-beam lithography and reactive-ion etching on LaSF35, with index n = 2.014. Measurement of the point-spread function is performed with near-field optical microscopy. The results are in accord with the expected resolution enhancement of a factor n with respect to the diffraction limit.

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