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Appl Opt. 2003 Aug 1;42(22):4573-9.

Porous broadband antireflection coating by glancing angle deposition.

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Department of Electrical and Computer Engineering, Second Level Electrical and Computer Engineering Research Facility, University of Alberta, Edmonton, Alberta T6G 2V4, Canada.


We deposited graded-index SiO2 films using glancing angle deposition to produce high-transmission antireflection coatings on glass. Because of the accurate control over the thin-film microstructure provided by this technique, we were able to create graded densities with a Gaussian profile resulting in transmission values greater than 99.9% for a single-layer interface with bandwidths up to 460 nm. The graded-index layer also provides low reflectance at nonnormal angles of incidence with transmission values degrading little for incidence angles up to 30 degrees.


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