Format

Send to

Choose Destination
See comment in PubMed Commons below
Appl Opt. 2002 Aug 1;41(22):4630-7.

Microellipsometer with radial symmetry.

Author information

1
Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis 55455, USA. qzhan@ece.umn.edu

Abstract

We report on a novel microellipsometer that uses a spatially filtered high-numerical-aperture (NA) lens for large-angle ellipsometric illumination and high spatial resolution. A radially symmetric ellipsometric signal is achieved with two half-wave plates to produce a pure polarization rotation and a birefringent cube as a radial analyzer. This radial symmetry offers a better signal-to-noise ratio compared with other microellipsometer techniques. Ellipsometric measurement with a spatial resolution of 0.5 microm is performed with a He-Ne (632.8-nm) laser source and an objective lens with an NA of 0.8. Experimental data on SiO2 samples with different thicknesses are in good agreement with spectroscopic ellipsometer results. We acquired ellipsometric images of photoresist microstructure through scanning the sample. Surface profiles of the photoresist microstructure are derived from the ellipsometric data and compared with the results from a stylus profiler.

PMID:
12153096
PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for Optical Society of America
    Loading ...
    Support Center