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Appl Opt. 2002 May 1;41(13):2394-400.

Performance of normal-incidence molybdenum-yttrium multilayer-coated diffraction grating at a wavelength of 9 nm.

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Physics and Advanced Technologies, Lawrence Livermore National Laboratory, Livermore, California 94551, USA.


The first experimental investigation of a normal-incidence Mo-Y multilayer-coated diffraction grating operating at a 9-nm wavelength is reported. The substrate is a replica of a concave holographic ion-etched blazed grating with 2,400 grooves/mm and a 2-m radius of curvature. The measured peak efficiency in the -3 order is 2.7% at a wavelength of 8.79 nm. To our knowledge, this is the highest normal-incidence grating efficiency ever obtained in this wavelength region.

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