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Appl Opt. 2002 Apr 1;41(10):2043-7.

Internal stress and optical properties of Nb2O5 thin films deposited by ion-beam sputtering.

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1
Institute of Optical Sciences, National Central University, Chung-li, Taiwan. cclee@ios.ncu.edu.tw

Abstract

The influence on the internal stress and optical properties of Nb2O5 thin films with ion-beam energy was investigated. Nb2O5 thin films were deposited on unheated glass substrates by means of ion-beam sputtering with different ion-beam voltage, Vb. The refractive index, extinction coefficient, and surface roughness were found to depend on the ion-beam energy. The stresses in thin films were measured by the phase-shifting interferometry technique. The film stress was also found to be related to Vb, and a high compressive stress of -0.467 GPa was measured at Vb = 850 V. The Nb2O5-SiO2 multilayer coatings had smaller average compressive stress as compared with single-layer Nb2O5 film.

PMID:
11936809
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