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Ultramicroscopy. 2001 Jan;86(1-2):191-206.

Fabrication of quantum well microcantilever photon detectors.

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Oak Ridge National Laboratory, TN 37831-8039, USA.


We have developed a new method for fabricating quantum well microcantilever arrays that can be used in a variety of sensing applications. Microcantilevers with quantum wells allow real-time manipulation of energy states using external stress thus providing photon wavelength tunability. For example, this can result in an effective and rapid change in electron energy levels in photon detection devices. We applied this microfabrication technique to develop InSb microcantilevers and small arrays of GaAs/GaA1As microcantilever quantum wells. Such arrays can be useful in the detection of infrared (IR) radiation at room temperature.


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