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Phys Rev Lett. 2000 May 8;84(19):4393-6.

Structure and energetics of the Si- SiO2 interface

Author information

  • 1IBM Research Division, T. J. Watson Research Center, P.O. Box 218, Yorktown Heights, New York 10598, USA.

Abstract

Using a Monte Carlo approach, we identify low-energy structures for the (001)-oriented Si-SiO2 interface. The optimal interface structure found consists of an ordered array of Si-O-Si "bridges," with low strain energy. This structure explains several puzzling experimental observations.

PMID:
10990694
DOI:
10.1103/PhysRevLett.84.4393
[PubMed - as supplied by publisher]
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