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Items: 1 to 20 of 28

1.
Jani C. Ingram, Lindsey Jones, Jonathan Credo, Tommy Rock
J Vac Sci Technol A. 2020 May; 38(3): 031003. Published online 2020 Mar 20. doi: 10.1116/1.5142283
PMCID:
PMC7083651
2.
Patrick F. Egan, Jack A. Stone, Julia K. Scherschligt, Allan H. Harvey
J Vac Sci Technol A.
Published in final edited form as: J Vac Sci Technol A. 2019; 37: https://doi.org/10.1116/1.5092185.
PMCID:
PMC6760043
3.
Christopher M. Goodwin, Zachary E. Voras, Thomas P. Beebe, Jr.
J Vac Sci Technol A. 2018 Sep; 36(5): 051507. Published online 2018 Jul 27. doi: 10.1116/1.5044643
PMCID:
PMC6063752
4.
Angel Aleman, Chao Li, Hicham Zaid, Hanna Kindlund, Joshua Fankhauser, Sergey V. Prikhodko, Mark S. Goorsky, Suneel Kodambaka
J Vac Sci Technol A. 2018 May; 36(3): 030602. Published online 2018 Mar 23. doi: 10.1116/1.5021609
PMCID:
PMC5866153
5.
Yichen Duan, Sana Rani, John T. Newberg, Andrew V. Teplyakov
J Vac Sci Technol A. 2018 Jan; 36(1): 01B101. Published online 2017 Aug 21. doi: 10.1116/1.4986208
PMCID:
PMC5565488
6.
Makfir Sefa, Zeeshan Ahmed, James A. Fedchak, Julia Scherschligt, Nikolai Klimov
J Vac Sci Technol A.
Published in final edited form as: J Vac Sci Technol A. 2016 Nov; 34(6): 061603. Published online 2016 Oct 25. doi: 10.1116/1.4965304
PMCID:
PMC5514850
7.
Masatoshi Kawakami, Dominik Metzler, Chen Li, Gottlieb S. Oehrlein
J Vac Sci Technol A. 2016 Jul; 34(4): 040603. Published online 2016 May 24. doi: 10.1116/1.4949260
PMCID:
PMC4884190
8.
Rami N. Foster, Patrik K. Johansson, Nicole R. Tom, Patrick Koelsch, David G. Castner
J Vac Sci Technol A. 2015 Sep; 33(5): 05E131. Published online 2015 Aug 27. doi: 10.1116/1.4929506
PMCID:
PMC4570287
9.
Takaaki Iwai, Koji Eriguchi, Shohei Yamauchi, Naotaka Noro, Junichi Kitagawa, Kouichi Ono
J Vac Sci Technol A. 2015 Nov; 33(6): 061403. Published online 2015 Jul 24. doi: 10.1116/1.4927128
PMCID:
PMC4514719
10.
Donald R. Baer, Mark H. Engelhard, Grant E. Johnson, Julia Laskin, Jinfeng Lai, Karl Mueller, Prabhakaran Munusamy, Suntharampillai Thevuthasan, Hongfei Wang, Nancy Washton, Alison Elder, Brittany L. Baisch, Ajay Karakoti, Satyanarayana V. N. T. Kuchibhatla, DaeWon Moon
J Vac Sci Technol A. 2013 Sep; 31(5): 050820. Published online 2013 Aug 27. doi: 10.1116/1.4818423
PMCID:
PMC3869349
11.
John M. Gregoire, Darren Dale, Alexander Kazimirov, Francis J. DiSalvo, R. Bruce van Dover
J Vac Sci Technol A. 2010 Sep; 28(5): 1279–1280. Published online 2010 Sep 3. doi: 10.1116/1.3478668
PMCID:
PMC4043122
12.
W. Hu, E. K. F. Yim, R. M. Reano, K. W. Leong, S. W. Pang
J Vac Sci Technol A.
Published in final edited form as: J Vac Sci Technol A. 2005 Nov; 23(6): 2984–2989. doi: 10.1116/1.2121729
PMCID:
PMC2597796
13.
Abraham G. Beyene, Sarah J. Yang, Markita P. Landry
J Vac Sci Technol A. 2019 Jul; 37(4): 040802. Published online 2019 Jun 11. doi: 10.1116/1.5051047
PMCID:
PMC6559927
14.
Mahsa Konh, Chuan He, Xi Lin, Xiangyu Guo, Venkateswara Pallem, Robert L. Opila, Andrew V. Teplyakov, Zijian Wang, Bo Yuan
J Vac Sci Technol A. 2019 Mar; 37(2): 021004. Published online 2019 Feb 26. doi: 10.1116/1.5082187
PMCID:
PMC6396405
15.
Donald R. Baer, Kateryna Artyushkova, C. Richard Brundle, James E. Castle, Mark H. Engelhard, Karen J. Gaskell, John T. Grant, Richard T. Haasch, Matthew R. Linford, Cedric J. Powell, Alexander G. Shard, Peter M. A. Sherwood, Vincent S. Smentkowski
J Vac Sci Technol A.
Published in final edited form as: J Vac Sci Technol A. 2019; 37: 10.1116/1.5065501. doi: 10.1116/1.5065501
PMCID:
PMC6774202
16.
Mahsa Konh, Chuan He, Zhengxin Li, Shi Bai, Elena Galoppini, Lars Gundlach, Andrew V. Teplyakov
J Vac Sci Technol A. 2018 Jul; 36(4): 041404. Published online 2018 Jun 29. doi: 10.1116/1.5031945
PMCID:
PMC6026025
17.
James A. Fedchak, Julia Scherschligt, Daniel Barker, Stephen Eckel, Alex P. Farrell, Makfir Sefa
J Vac Sci Technol A.
Published in final edited form as: J Vac Sci Technol A. 2018 Mar; 36(2): 023201. doi: 10.1116/1.5016181
PMCID:
PMC5986099
18.
Brent A. Sperling, James E. Maslar, Sergei V. Ivanov
J Vac Sci Technol A.
Published in final edited form as: J Vac Sci Technol A. 2018; 36: 10.1116/1.5026488. doi: 10.1116/1.5026488
PMCID:
PMC7079703
19.
James A. Fedchak, Patrick J. Abbott, Jay H. Hendricks, Paul C. Arnold, Neil T. Peacock
J Vac Sci Technol A.
Published in final edited form as: J Vac Sci Technol A. 2018; 36: 10.1116/1.5025060. doi: 10.1116/1.5025060
PMCID:
PMC6513016
20.
Achim von Keudell, Carles Corbella
J Vac Sci Technol A. 2017 Sep; 35(5): 050801. Published online 2017 May 10. doi: 10.1116/1.4983275
PMCID:
PMC5648578

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