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Items: 3

1.

Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society

American Vacuum Society; American Institute of Physics.

NLM Title Abbreviation: J Vac Sci Technol A
ISSN:0734-2101 (Print) ; 1520-8559 (Electronic) ; 0734-2101 (Linking)
New York : Published for the Society by the American Institute of Physics, 1983-
Not currently indexed for MEDLINE

NLM ID:
9890566
[Serial]
2.

Journal of vacuum science & technology. B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society.

American Vacuum Society; American Institute of Physics.

ISSN:0734-211X (Print) ; 0734-211X (Linking)
New York, N.Y. : Published for the Society by the American Institute of Physics, 1983-c1990.

NLM ID:
9890567
[Serial]
3.

The Journal of vacuum science and technology.

American Institute of Physics; American Vacuum Society.

ISSN:0022-5355 (Print) ; 0022-5355 (Linking)
[New York, N.Y.] : Published for the American Vacuum Society by the American Institute of Physics, [1964-1982]

NLM ID:
9890565
[Serial]
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