State of the Art and Future Perspectives in Advanced CMOS Technology.
Radamson HH, Zhu H, Wu Z, He X, Lin H, Liu J, Xiang J, Kong Z, Xiong W, Li J, Cui H, Gao J, Yang H, Du Y, Xu B, Li B, Zhao X, Yu J, Dong Y, Wang G.
Radamson HH, et al.
Nanomaterials (Basel). 2020 Aug 7;10(8):1555. doi: 10.3390/nano10081555.
Nanomaterials (Basel). 2020.
PMID: 32784801
Free PMC article.
Review.
This article presents a review of new architectures, simulation methods, and process technology for nano-scale transistors on the approach to the end of ITRS technology. The discussions cover innovative methods, challenges and difficulties in device processing, as w …
This article presents a review of new architectures, simulation methods, and process technology for nano-scale transistors on the app …