Display Settings:

Format

Send to:

Choose Destination
See comment in PubMed Commons below
Nanoscale Res Lett. 2012 Jul 17;7(1):398. doi: 10.1186/1556-276X-7-398.

Analysis methods for meso- and macroporous silicon etching baths.

Author information

  • 1Institute for Solar Energy Research Hamelin (ISFH), Am Ohrberg 1, Emmerthal, 31860, Germany. nehmann@isfh.de.

Abstract

: Analysis methods for electrochemical etching baths consisting of various concentrations of hydrofluoric acid (HF) and an additional organic surface wetting agent are presented. These electrolytes are used for the formation of meso- and macroporous silicon. Monitoring the etching bath composition requires at least one method each for the determination of the HF concentration and the organic content of the bath. However, it is a precondition that the analysis equipment withstands the aggressive HF. Titration and a fluoride ion-selective electrode are used for the determination of the HF and a cuvette test method for the analysis of the organic content, respectively. The most suitable analysis method is identified depending on the components in the electrolyte with the focus on capability of resistance against the aggressive HF.

PMID:
22805742
[PubMed]
PMCID:
PMC3443038
Free PMC Article

Images from this publication.See all images (4)Free text

Figure 1
Figure 2
Figure 3
Figure 4
PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for BioMed Central Icon for PubMed Central
    Loading ...
    Write to the Help Desk