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Opt Lett. 2011 Apr 1;36(7):1119-21. doi: 10.1364/OL.36.001119.

Hybrid Si-LiNbO₃ microring electro-optically tunable resonators for active photonic devices.

Author information

  • 1Department of Electrical Engineering, University of Southern California, Los Angeles, California 90007, USA. yooseunl@usc.edu

Abstract

Hybrid Si-LiNbO₃ electro-optic tunable ring resonators have been proposed and demonstrated as a path to achieving ultracompact and high-speed electro-optic devices. Free standing single crystal LiNbO₃ microplatelets (~mm long and ~1 μm thick) were obtained from a z-cut LiNbO₃ substrate by ion implantation and thermal treatment. The platelets were transferred and thermally bonded on top of Si resonators that were fabricated in a Si-on-insulator platform by a 0.18 μm standard complementary metal-oxide-semiconductor process. For the hybrid microring resonator, a free spectral range of 16.5 nm, a finesse F of ~1.67 × 10², a Q-factor of ~1.68 × 10⁴, and an effective r coefficient of ~1.7 pm/V were achieved for the TE mode. These values are in good agreement with the calculated results.

PMID:
21479002
[PubMed]
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