Improvement of the robustness of superhydrophobic surfaces is critical in order to achieve commercial applications of these surfaces in such diverse areas as self-cleaning, water repellency and corrosion resistance. In this study, the mechanical robustness of superhydrophobic surfaces was evaluated on hierarchically structured silicon surfaces. The effect of two-scale hierarchical structures on robustness was investigated using an abrasion test and the results compared to those of superhydrophobic surfaces fabricated from polymeric materials and from silicon that contains only nanostructures. Unlike the polymeric and nanostructure-only surfaces, the hierarchical structures retained superhydrophobic behavior after mechanical abrasion.