Compact water-window transmission X-ray microscopy

J Microsc. 2000 Mar;197(Pt 3):268-73. doi: 10.1046/j.1365-2818.2000.00675.x.

Abstract

We demonstrate sub-100 nm resolution water-window soft X-ray full-field transmission microscopy with a compact system. The microscope operates at lambda = 3.37 nm and is based on a 100 Hz table-top regenerative debris-free droplet-target laser-plasma X-ray source in combination with normal-incidence multilayer condenser optics for sample illumination. High-spatial-resolution imaging is performed with a 7.3% efficiency nickel zone plate and a 1024 x 1024 pixel CCD detector. Images of dry test samples are recorded with exposure times of a few minutes and show features smaller than 60 nm.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Diatoms / ultrastructure*
  • Lasers
  • Microscopy, Electron* / instrumentation
  • Microscopy, Electron* / methods
  • Optics and Photonics
  • X-Rays*