A new Kirkpatrick-Baez-based scanning microscope for the Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II

E Nazaretski; D S Coburn; W Xu; J Ma; H Xu; R Smith; X Huang; Y Yang; L Huang; M Idir; A Kiss; Y S Chu

doi:10.1107/S1600577522007056

A new Kirkpatrick-Baez-based scanning microscope for the Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II

J Synchrotron Radiat. 2022 Sep 1;29(Pt 5):1284-1291. doi: 10.1107/S1600577522007056. Epub 2022 Jul 29.

Authors

E Nazaretski¹, D S Coburn¹, W Xu¹, J Ma¹, H Xu¹, R Smith¹, X Huang¹, Y Yang¹, L Huang¹, M Idir¹, A Kiss¹, Y S Chu¹

Affiliation

¹ National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA.

Abstract

The development, construction, and first commissioning results of a new scanning microscope installed at the 5-ID Submicron Resolution X-ray Spectroscopy (SRX) beamline at NSLS-II are reported. The developed system utilizes Kirkpatrick-Baez mirrors for X-ray focusing. The instrument is designed to enable spectromicroscopy measurements in 2D and 3D with sub-200 nm spatial resolution. The present paper focuses on the design aspects, optical considerations, and specifics of the sample scanning stage, summarizing some of the initial commissioning results.

Keywords: KB optics; X-ray microscopy; X-ray microscopy instrumentation.

open access.

Grants and funding

DE-SC0012704/US Department of Energy (DOE) Office of Science User Facilities operated for the DOE Office of Science by Brookhaven National Laboratory