Theoretical and Experimental Study on Nonlinear Failure of an MEMS Accelerometer under Dual Frequency Acoustic Interference

In order to quantitatively study the interfered output of the accelerometer under an acoustic injection attack, a mathematical model for fitting and predicting the accelerometer output was proposed. With ADXL103 as an example, an acoustic injection attack experiment with amplitude sweeping and frequency sweeping was performed. In the mathematical model, the R-squared coefficient was R² = 0.9990 in the acoustic injection attack experiment with amplitude sweeping, and R² = 0.9888 with frequency sweeping. Based on the mathematical model, the dual frequency acoustic injection attack mode was proposed. The difference frequency signal caused by the nonlinear effect was not filtered by the low-pass filter. At a 115 dB sound pressure level, the maximum acceleration bias of the output was 4.4 m/s² and the maximum amplitude of fluctuation was 4.97 m/s². Two kinds of methods of prevention against acoustic injection attack were proposed, including changing the damping ratio of the accelerometer and adding a preposition low-pass filter.