Computer simulations analysis for determining the polarity of charge generated by high energy electron irradiation of a thin film

Marek Malac; Simon Hettler; Misa Hayashida; Masahiro Kawasaki; Yuji Konyuba; Yoshi Okura; Hirofumi Iijima; Isamu Ishikawa; Marco Beleggia

doi:10.1016/j.micron.2017.03.015

Computer simulations analysis for determining the polarity of charge generated by high energy electron irradiation of a thin film

Micron. 2017 Sep:100:10-22. doi: 10.1016/j.micron.2017.03.015. Epub 2017 Apr 3.

Authors

Marek Malac¹, Simon Hettler², Misa Hayashida³, Masahiro Kawasaki⁴, Yuji Konyuba⁵, Yoshi Okura⁵, Hirofumi Iijima⁵, Isamu Ishikawa⁵, Marco Beleggia⁶

Affiliations

¹ National Institute of Nanotechnology, 11421 Saskatchewan Drive, T6G 2M9 Edmonton, Canada; Department of Physics, University of Alberta, T6G 2E1 Edmonton, Canada. Electronic address: mmalac@ualberta.ca.
² Laboratorium für Elektronenmikroskopie, Karlsruher Institut für Technologie, Engesserstr. 7, D-76131 Karlsruhe, Germany.
³ National Institute of Nanotechnology, 11421 Saskatchewan Drive, T6G 2M9 Edmonton, Canada.
⁴ JEOL USA Inc., 11 Dearborn Rd, Peabody, MA 01960, USA.
⁵ JEOL Ltd., 1-2 Musashino 3 chome, Akishima, Tokyo 198-8558, Japan.
⁶ Center for Electron Nanoscopy, Technical University of Denmark, 2800 Kgs. Lyngby, Denmark.

PMID: 28448831
DOI: 10.1016/j.micron.2017.03.015

Abstract

Detailed simulations are necessary to correctly interpret the charge polarity of electron beam irradiated thin film patch. Relying on systematic simulations we provide guidelines and movies to interpret experimentally the polarity of the charged area, to be understood as the sign of the electrostatic potential developed under the beam with reference to a ground electrode. We discuss the two methods most frequently used to assess charge polarity: Fresnel imaging of the irradiated area and Thon rings analysis. We also briefly discuss parameter optimization for hole free phase plate (HFPP) imaging. Our results are particularly relevant to understanding contrast of hole-free phase plate imaging and Berriman effect.

Keywords: Electron beam induced charging; Fresnel images; Hole-free phase plate; Radiation damage; Thon rings; Volta phase plate.