Rotatable Offner imaging system for ellipsometric measurement

L Jin; T Tanaka; E Kondoh; B Gelloz; K Sano; I Fujio; Y Kajiyama; M Uehara

doi:10.1063/1.4973778

Rotatable Offner imaging system for ellipsometric measurement

Rev Sci Instrum. 2017 Jan;88(1):013704. doi: 10.1063/1.4973778.

Authors

L Jin¹, T Tanaka¹, E Kondoh¹, B Gelloz², K Sano³, I Fujio³, Y Kajiyama³, M Uehara³

Affiliations

¹ Faculty of Engineering, University of Yamanashi, Kofu, 400-8511 Yamanashi, Japan.
² Faculty of Engineering, Nagoya University, Nagoya, Aichi 464-8601, Japan.
³ Mejiro Genossen, Inc., Tokyo 161-0033, Japan.

PMID: 28147651
DOI: 10.1063/1.4973778

Abstract

To realize high spatial resolution imaging ellipsometric measurement with large field of view, we developed a rotatable Offner system with unit magnification. When the conventional Offner imaging system is tilted relative to the sample plane for the ellipsometric measurement, only a small region of plane is in focus. The rotatable Offner system developed here renders the entire object in focus through all rotations. The performance of the prototype of the Offner system and imaging ellipsometer is tested by generating maps of the ellipsometric parameters Δ and Ψ for samples such as a silicon wafer and a resolution target made of chromium film evaporated on a glass substrate.