Display Settings:


Send to:

Choose Destination
See comment in PubMed Commons below
IEEE Trans Biomed Circuits Syst. 2014 Jun 18. [Epub ahead of print]

Respiration Detection Chip With Integrated Temperature-Insensitive MEMS Sensors and CMOS Signal Processing Circuits.


An airflow sensing chip, which integrates MEMS sensors with their CMOS signal processing circuits into a single chip, is proposed for respiration detection. Three micro-cantilever-based airflow sensors were designed and fabricated using a 0.35 μ m CMOS/MEMS 2P4M mixed-signal polycide process. Two main differences were present among these three designs: they were either metal-covered or metal-free structures, and had either bridge-type or fixed-type reference resistors. The performances of these sensors were measured and compared, including temperature sensitivity and airflow sensitivity. Based on the measured results, the metal-free structure with fixed-type reference resistors is recommended for use, because it has the highest airflow sensitivity and also can effectively reduce the output voltage drift caused by temperature change.

[PubMed - as supplied by publisher]
PubMed Commons home

PubMed Commons

How to join PubMed Commons

    Supplemental Content

    Loading ...
    Write to the Help Desk