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Opt Express. 2013 Nov 18;21(23):28189-97. doi: 10.1364/OE.21.028189.

Aberration compensation in aplanatic solid immersion lens microscopy.


The imaging quality of an aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the samples have thicknesses that are more than a few micrometers thicker or thinner than the design thickness. Aberration due to the sample thickness error is modeled and compared with measurements obtained in a high numerical aperture (NA ~3.5) microscope. A technique to recover near-ideal imaging quality by compensating aberrations using a MEMS deformable mirror is described and demonstrated.

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