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Rev Sci Instrum. 2013 Dec;84(12):123705. doi: 10.1063/1.4848995.

An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements.

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  • 1Institut d'Electronique, de Microélectronique et de Nanotechnologie, CNRS UMR 8520∕University of Lille 1, Avenue Poincaré, CS 60069, 59652 Villeneuve d'Ascq, France.
  • 2Agilent Technologies, 1400 Fountaingrove Parkway, Santa Rosa, California 95403, USA.


We report on an adjustable interferometric set-up for Scanning Microwave Microscopy. This interferometer is designed in order to combine simplicity, a relatively flexible choice of the frequency of interference used for measurements as well as the choice of impedances range where the interference occurs. A vectorial calibration method based on a modified 1-port error model is also proposed. Calibrated measurements of capacitors have been obtained around the test frequency of 3.5 GHz down to about 0.1 fF. Comparison with standard vector network analyzer measurements is shown to assess the performance of the proposed system.

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