Display Settings:

Format

Send to:

Choose Destination
See comment in PubMed Commons below
Rev Sci Instrum. 2013 Dec;84(12):123705. doi: 10.1063/1.4848995.

An interferometric scanning microwave microscope and calibration method for sub-fF microwave measurements.

Author information

  • 1Institut d'Electronique, de Microélectronique et de Nanotechnologie, CNRS UMR 8520∕University of Lille 1, Avenue Poincaré, CS 60069, 59652 Villeneuve d'Ascq, France.
  • 2Agilent Technologies, 1400 Fountaingrove Parkway, Santa Rosa, California 95403, USA.

Abstract

We report on an adjustable interferometric set-up for Scanning Microwave Microscopy. This interferometer is designed in order to combine simplicity, a relatively flexible choice of the frequency of interference used for measurements as well as the choice of impedances range where the interference occurs. A vectorial calibration method based on a modified 1-port error model is also proposed. Calibrated measurements of capacitors have been obtained around the test frequency of 3.5 GHz down to about 0.1 fF. Comparison with standard vector network analyzer measurements is shown to assess the performance of the proposed system.

PMID:
24387439
[PubMed]
PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for American Institute of Physics
    Loading ...
    Write to the Help Desk