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Micron. 2013 Sep-Oct;52-53:62-6. doi: 10.1016/j.micron.2013.07.006. Epub 2013 Jul 30.

Combined effects of sample parameters on polymer charging due to electron irradiation: a contour simulation.

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  • 1Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Department of Electronic Science and Technology, Xi'an Jiaotong University, Xi'an 710049, People's Republic of China.

Abstract

Combined effects of sample parameters on polymer charging due to electron irradiation are explored by a novel approach of contour in parallel computing. Transient processes of negative charging of a Kapton film sample irradiated by 10 keV electrons are simulated with a simultaneous scattering-transport model and the existing experimental secondary electron current. As a function of sample thickness and electron mobility, the contour maps are then presented of the steady-state leakage current and surface potential and the total charge accumulated in a charging process. It is found that the leakage current and surface potential behave similarly in the contour form, and the total charge has the local maximum with respect to the sample thickness. Generally, the sample thickness affects the charging process more than the electron mobility, but both have less influence in very strong and weak charging states. Accompanied by discussion of charge dissipation effects, this study offers a comprehensive insight into complicated charging phenomena in electron-based surface microscopy, analysis and measurement.

Copyright © 2013 Elsevier Ltd. All rights reserved.

KEYWORDS:

Charging; Contour map; Electron irradiation; Electron mobility; Numerical simulation; Polymer; Sample thickness

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