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Appl Opt. 2013 Jun 1;52(16):3726-31. doi: 10.1364/AO.52.003726.

Profile measurement of glass sheet using multiple wavelength backpropagation interferometry.

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  • 1Department of Electrical and Electronics Engineering, Niigata University, Niigata, Japan. schoi@eng.niigata-u.ac.jp


Multiple-wavelength backpropagation interferometry based on a spectral interferometer is proposed for measuring thin glass sheets with nanometer accuracy. The multiwavelength backpropagation method introduced to the spectral interferometer eliminates time-encoded wavelength sweeping and mechanical scanning, which enables high-speed profile measurements. The applicability of the proposed method is experimentally demonstrated through cross-sectional profile and vibrating surface displacement measurements of a glass sheet.

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