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Microsc Res Tech. 2013 May;76(5):476-80. doi: 10.1002/jemt.22189. Epub 2013 Mar 20.

Cross-section metal sample preparations for transmission electron microscopy by electro-deposition and electropolishing.

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  • 1National High Magnetic Field Laboratory, Tallahassee, FL 32310, USA.


A cross-section sample preparation technique is described for transmission electron microscopy studies of metallic materials. The technique uses jet electro-polishing for the final perforation. Examples are provided of using this technique for copper-support/copper-films/copper-support multilayer structures, grown by electro-deposition. The samples prepared by our current technique are compared with the ones made by ion-milling. The technique is also applicable to materials which are susceptible to ion beam and thermal damages.

Copyright © 2013 Wiley Periodicals, Inc.

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