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Small. 2013 Sep 23;9(18):3058-62. doi: 10.1002/smll.201203014. Epub 2013 Feb 20.

Plow and ridge nanofabrication.

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  • 1Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, IL 60208, USA.

Abstract

Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.

Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

KEYWORDS:

atomic force microscopy; nanofabrication; nanolithography; polymers; scanning probe microscopy

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