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Opt Express. 2012 Jul 30;20(16):18440-8. doi: 10.1364/OE.20.018440.

MZI optical isolator with Si-wire waveguides by surface-activated direct bonding.

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  • 1Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, 2-12-1-S3-11 Ookayama, Tokyo 152-8552, Japan. shoji.y.ad@m.titech.ac.jp


We fabricate a Mach-Zehnder interferometer-based optical isolator using a silicon-wire waveguide with magneto-optic garnet cladding using direct bonding techniques. Using Si-wire waveguides, the size of the device is greatly reduced from that of our previous device. We investigate surface-activated direct bonding with nitrogen plasma treatment, which shows better bonding results than oxygen plasma treatment. A large magneto-optic phase shift of 0.8π and an optical isolation of 18 dB are obtained at a wavelength of 1322 nm.

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