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Opt Express. 2012 Sep 24;20(20):22531-6. doi: 10.1364/OE.20.022531.

Fabrication and characterization of suspended SiO2 ridge optical waveguides and the devices.

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  • 1Centre for Optical and Electromagnetic Research, State Key Laboratory for Modern Optical Instrumentation, Zhejiang Provincial Key Laboratory for Sensing Technologies, Zhejiang University, Zijingang Campus, Hangzhou 310058, China.

Abstract

Novel suspended SiO(2) ridge optical waveguides on silicon are fabricated and characterized. The present suspended SiO(2) ridge optical waveguide has a SiO(2) ridge core surrounded by air. The propagation loss and the bend loss measured are about 0.385dB/cm and 0.037dB/90° respectively for the fabricated 1 μm-wide waveguides with a bending radius of 100 μm when operating at the wavelength of 1550 nm. With the present suspended SiO(2) optical waveguides, a small racetrack resonator with a radius of 100 μm is also demonstrated and the measured Q-factor is about 3160.

PMID:
23037402
[PubMed - indexed for MEDLINE]
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