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J Nanosci Nanotechnol. 2012 Jul;12(7):5245-51.

X Y parallel compliant stage with compact configuration.

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  • 1Nano Convergence and Manufacturing Systems Research Division, Korea Institute of Machinery and Materials, Daejeon 305-343, South Korea.


This paper presents a piezo-driven compliant stage for nano positioning with two degree-of-freedom parallel linear motions. Nano positioning is one of the most important factors in completion of nanotechnologies. It can be accomplished by flexure-based compliant stages driven by piezo-actuators. For compact configuration, the compliant stage is stacked by two-layered compliant mechanisms. The upper layer contains a motion guide mechanism, and the lower layer two displacement amplification mechanisms. The motion guide mechanism consists of four prismatic-prismatic parallel compliant joint chains for two translational motion guides. The displacement amplification mechanism is adopted by a flexure-based flextensional amplification mechanism driven by a stack-type piezo actuator. Due to the parallel compliant joint chains, the stage has the same dynamics in the x and y axes. In this study, through design and analysis, the mechanisms were machined via wire electro-discharge machining and are were then integrated with two stack-type piezoelectric elements for actuation, and two capacitive sensors for ultra-precision displacement measurement. Finally, experiments were carried out to demonstrate the performance of the compliant stage.

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