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J Lab Autom. 2012 Aug;17(4):248-54. doi: 10.1177/2211068212450289. Epub 2012 Jun 19.

Nanofabrication using near-field optical probes.

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  • 1Electrical Engineering Department, University of California, Los Angeles, California 91801, USA. euanmc@ucla.edu


Nanofabrication using near-field optical probes is an established technique for rapid prototyping and automated maskless fabrication of nanostructured devices. In this review, we present the primary types of near-field probes and their physical processing mechanisms. Highlights of recent developments include improved resolution by optimizing the probe shape, incorporation of surface plasmonics in probe design, broader use in biological and magnetic storage applications, and increased throughput using probe arrays as well as high-speed writing and patterning.

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