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Opt Express. 2012 Apr 23;20(9):9777-83. doi: 10.1364/OE.20.009777.

Real space soft x-ray imaging at 10 nm spatial resolution.

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  • 1Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA.


Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies.

© 2012 Optical Society of America

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