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Nanoscale Res Lett. 2012 Mar 23;7:196. doi: 10.1186/1556-276X-7-196.

3D simulation of morphological effect on reflectance of Si3N4 sub-wavelength structures for silicon solar cells.

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  • 1Parallel and Scientific Computing Laboratory, Department of Electrical Engineering, National Chiao Tung University, 1001 Ta-Hsueh Road, Hsinchu 300, Taiwan.


In this study, we investigate the reflectance property of the cylinder, right circular cone, and square pyramid shapes of silicon nitride (Si3N4) subwavelength structure (SWS) with respect to different designing parameters. In terms of three critical factors, the reflectance for physical characteristics of wavelength dependence, the reflected power density for real power reflection applied on solar cell, and the normalized reflectance (reflected power density/incident power density) for real reflectance applied on solar cell, a full three-dimensional finite element simulation is performed and discussed for the aforementioned three morphologies. The result of this study shows that the pyramid shape of SWS possesses the best reflectance property in the optical region from 400 to 1000 nm which is useful for silicon solar cell applications.

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