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Rev Sci Instrum. 2012 Feb;83(2):02A706. doi: 10.1063/1.3670346.

Optimization of negative ion current in a compact microwave driven upper hybrid resonance multicusp plasma source.

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  • 1Department of Physics, Indian Institute of Technology, Kanpur 208016, India.


Performance of a microwave driven upper hybrid resonance multicusp plasma source as a volume negative ion source is reported. Microwaves are directly launched into the plasma chamber predominantly in the TE(11) mode. The source is operated at different discharge conditions to obtain the optimized negative H(-) ion current which is ∼33 μA (0.26 mA∕cm(2)). Particle balance equations are solved to estimate the negative ion density, which is compared with the experimental results. Future prospects of the source are discussed.

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