Dependence of ion beam current on position of mobile plate tuner in multi-frequencies microwaves electron cyclotron resonance ion source

Yosuke Kurisu; Ryutaro Kiriyama; Tomoya Takenaka; Dai Nozaki; Fuminobu Sato; Yushi Kato; Toshiyuki Iida

doi:10.1063/1.3662016

Dependence of ion beam current on position of mobile plate tuner in multi-frequencies microwaves electron cyclotron resonance ion source

Rev Sci Instrum. 2012 Feb;83(2):02A310. doi: 10.1063/1.3662016.

Authors

Yosuke Kurisu¹, Ryutaro Kiriyama, Tomoya Takenaka, Dai Nozaki, Fuminobu Sato, Yushi Kato, Toshiyuki Iida

Affiliation

¹ Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan. kurisu@i-beam.jp

PMID: 22380157
DOI: 10.1063/1.3662016

Abstract

We are constructing a tandem-type electron cyclotron resonance ion source (ECRIS). The first stage of this can supply 2.45 GHz and 11-13 GHz microwaves to plasma chamber individually and simultaneously. We optimize the beam current I(FC) by the mobile plate tuner. The I(FC) is affected by the position of the mobile plate tuner in the chamber as like a circular cavity resonator. We aim to clarify the relation between the I(FC) and the ion saturation current in the ECRIS against the position of the mobile plate tuner. We obtained the result that the variation of the plasma density contributes largely to the variation of the I(FC) when we change the position of the mobile plate tuner.

MeSH terms

Cyclotrons*
Electrons*
Microwaves*
Plasma Gases / chemistry

Substances

Plasma Gases