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Opt Lett. 2012 Mar 1;37(5):848-50. doi: 10.1364/OL.37.000848.

Rapid in-process measurement of surface roughness using adaptive optics.

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  • 1Institute of Opto-Mechatronics Engineering, National Central University, No. 300, Jhongda Road, Jhongli City, Taoyuan County 32001, Taiwan.


We present an in-process measurement of surface roughness by combining an optical probe of laser-scattering phenomena and adaptive optics for aberration correction. Measurement results of five steel samples with a roughness ranging from 0.2 to 3.125 μm demonstrate excellent correlation between the peak power and average roughness with a correlation coefficient (R(2)) of 0.9967. The proposed adaptive-optics-assisted system is in good agreement with the stylus method, and error values of less than 8.7% are obtained for average sample roughness in the range of 0.265 to 1.119 μm. The proposed system can be used as a rapid in-process roughness monitor/estimator to further increase the precision and stability of manufacturing processes in situ.

© 2012 Optical Society of America

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