Display Settings:

Format

Send to:

Choose Destination
See comment in PubMed Commons below
Opt Express. 2012 Jan 2;20(1):627-34. doi: 10.1364/OE.20.000627.

Comb-drive tracking and focusing lens actuators integrated on a silicon-on-insulator wafer.

Author information

  • 1Department of Nanomechanics, Tohoku University, Sendai 9808579, Japan. lipei08@mails.tsinghua.edu.cn

Abstract

This paper reports integrated tracking (horizontal) and focusing (vertical) actuators using microelectromechanical (MEMS) technology for optical storage. The design, fabrication and characterization of the integrated tracking and focusing actuators are demonstrated. The integrated tracking and focusing lens actuators that consist of springs, a lens holder and comb-drive actuators are implemented to obtain the two-dimensional tuning effect of an objective lens. A two-mask process is used to define the actuators on a silicon-on-insulator (SOI) wafer. The DC displacements and the frequency responses are characterized by applying voltage to the micro lens actuators. Displacements are experimentally characterized with ± 24.6μm in tracking direction and 5.7μm in focusing direction. Moreover, the influences of the cross-axis coupling are measured and evaluated. This MEMS device which has a small form factor provides an excellent response time and size reduction. The minimization and integration of the lens actuators can offer low costs in assembly and expand the application area of the optical head.

PMID:
22274386
[PubMed - indexed for MEDLINE]

LinkOut - more resources

Molecular Biology Databases

PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Loading ...
    Write to the Help Desk