Display Settings:

Format

Send to:

Choose Destination
See comment in PubMed Commons below
Sensors (Basel). 2011;11(5):4972-89. doi: 10.3390/s110504972. Epub 2011 May 4.

Two-scale simulation of drop-induced failure of polysilicon MEMS sensors.

Author information

  • 1Dipartimento di Ingegneria Strutturale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy. stefano.mariani@polimi.it

Abstract

In this paper, an industrially-oriented two-scale approach is provided to model the drop-induced brittle failure of polysilicon MEMS sensors. The two length-scales here investigated are the package (macroscopic) and the sensor (mesoscopic) ones. Issues related to the polysilicon morphology at the micro-scale are disregarded; an upscaled homogenized constitutive law, able to describe the brittle cracking of silicon, is instead adopted at the meso-scale. The two-scale approach is validated against full three-scale Monte-Carlo simulations, which allow for stochastic effects linked to the microstructural properties of polysilicon. Focusing on inertial MEMS sensors exposed to drops, it is shown that the offered approach matches well the experimentally observed failure mechanisms.

KEYWORDS:

brittle cracking; drops and shocks; finite element analysis; multi-scale simulations; polysilicon MEMS

PMID:
22163885
[PubMed - indexed for MEDLINE]
PMCID:
PMC3231397
Free PMC Article

Images from this publication.See all images (17)Free text

Figure 1.
Figure 2.
Figure 3.
Figure 4.
Figure 5.
Figure 6.
Figure 7.
Figure 8.
Figure 9.
Figure 10.
Figure 11.
Figure 12.
Figure 13.
Figure 14.
Figure 15.
Figure 16.
Figure 17.
PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Icon for Multidisciplinary Digital Publishing Institute (MDPI) Icon for PubMed Central
    Loading ...
    Write to the Help Desk