Display Settings:

Format

Send to:

Choose Destination
Sensors (Basel). 2010;10(9):8173-84. doi: 10.3390/s100908173. Epub 2010 Sep 1.

Micro cantilever movement detection with an amorphous silicon array of position sensitive detectors.

Author information

  • 1CENIMAT, Department of Materials Science, Faculty of Science and Technology of New University of Lisbon and CEMOP/UNINOVA, Campus da Caparica, 2928-516 Caparica, Portugal. ja@uninova.pt

Abstract

The movement of a micro cantilever was detected via a self constructed portable data acquisition prototype system which integrates a linear array of 32 1D amorphous silicon position sensitive detectors (PSD). The system was mounted on a microscope using a metal structure platform and the movement of the 30 μm wide by 400 μm long cantilever was tracked by analyzing the signals acquired by the 32 sensor array electronic readout system and the relevant data algorithm. The obtained results show a linear behavior of the photocurrent relating X and Y movement, with a non-linearity of about 3%, a spatial resolution of less than 2 μm along the lateral dimension of the sensor as well as of less than 3 μm along the perpendicular dimension of the sensor, when detecting just the micro-cantilever, and a spatial resolution of less than 1 μm when detecting the holding structure.

KEYWORDS:

amorphous semiconductors; devices; silicon; systems

PMID:
22163648
[PubMed - indexed for MEDLINE]
PMCID:
PMC3231201
Free PMC Article

Images from this publication.See all images (6)Free text

Figure 1.
Figure 2.
Figure 3.
Figure 4.
Figure 5.
Figure 6.
PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for Multidisciplinary Digital Publishing Institute (MDPI) Icon for PubMed Central
    Loading ...
    Write to the Help Desk