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Opt Express. 2011 Oct 10;19(21):19919-24. doi: 10.1364/OE.19.019919.

Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm.

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  • 1Institute of Physics, Academia Sinica, Taipei 115, Taiwan.


Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width) used as objective lenses in a full field transmission reached a spatial resolution better than 20 nm and 1.5% efficiency with 8 keV photons. Zernike phase contrast was also realized without compromising the resolution. These are very significant achievements in the rapid progress of high-aspect-ratio zone plate fabrication by combined electron beam lithography and electrodeposition.

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