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Opt Express. 2011 Sep 26;19(20):18827-32. doi: 10.1364/OE.19.018827.

Etch-free low loss silicon waveguides using hydrogen silsesquioxane oxidation masks.

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  • 1ECE Department, University of California San Diego, 9500 Gilman Drive, MC 0440, La Jolla, California 92093-0440, USA.


An etch-free fabrication technique for creating low loss silicon waveguides in the silicon-on-insulator material system is proposed and demonstrated. The approach consists of local oxidation of a silicon-on-insulator chip covered with a e-beam patterned hydrogen silsesquioxane mask. A single oxidation step converts hydrogen silsesquioxane to a glass-like compound and simultaneously defines the waveguides, bypassing the need for any wet or dry etching steps. The spectral response of ring resonators fabricated using this technique was used to characterize the waveguide losses. Intrinsic Q-factors as high as 1.57 × 10(6), corresponding to a waveguide loss of 0.35 dB/cm, were measured.

© 2011 Optical Society of America

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