A portable, benchtop photolithography system based on a solid-state light source

Small. 2011 Nov 18;7(22):3144-7. doi: 10.1002/smll.201101209. Epub 2011 Sep 8.
No abstract available

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Microfluidics / instrumentation*
  • Microfluidics / methods*
  • Microscopy, Electron, Scanning
  • Ultraviolet Rays*