A portable, benchtop photolithography system based on a solid-state light source
Small
.
2011 Nov 18;7(22):3144-7.
doi: 10.1002/smll.201101209.
Epub 2011 Sep 8.
Authors
Mark D Huntington
1
,
Teri W Odom
Affiliation
1
Department of Materials Science and Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA.
PMID:
21901830
DOI:
10.1002/smll.201101209
No abstract available
Publication types
Research Support, Non-U.S. Gov't
Research Support, U.S. Gov't, Non-P.H.S.
MeSH terms
Microfluidics / instrumentation*
Microfluidics / methods*
Microscopy, Electron, Scanning
Ultraviolet Rays*