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Nanotechnology. 2008 Oct 29;19(43):435304. doi: 10.1088/0957-4484/19/43/435304. Epub 2008 Sep 22.

Using direct nanoimprinting of ferroelectric films to prepare devices exhibiting bi-directionally tunable surface plasmon resonances.

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  • 1Department of Materials Science and Engineering, National Taiwan University, Taipei 10617, Taiwan, Republic of China.


In this paper, we describe an imprint method for the fabrication of bi-directionally tunable surface plasmon resonance (SPR) filters. A periodic metal/ferroelectric film stack exhibiting SPR phenomena was directly imprinted using a sharp mold without the need for a polymer-based resist. Both the refractive index of the surrounding lead zirconate titanate (PZT) films and the period of the textured PZT/metal/PZT structure were dependent upon both the absolute value and sign of the applied potential. The SPR wavelength of the PZT/gold/PZT-based tunable filter varied over a range of greater than 100 nm when applying potentials ranging from 0 to -15 V. This imprinting method has great potential for use in the fabrication of tunable optical filters without the need for complicated processes or specific materials.

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