Display Settings:


Send to:

Choose Destination
See comment in PubMed Commons below
J Phys Condens Matter. 2009 Sep 9;21(36):364201. doi: 10.1088/0953-8984/21/36/364201. Epub 2009 Aug 19.

Understanding the chemical vapor deposition of diamond: recent progress.

Author information

  • 1Chemistry Division, Naval Research Laboratory, Washington, DC 20375, USA.


In this paper we review and provide an overview to the understanding of the chemical vapor deposition (CVD) of diamond materials with a particular focus on the commonly used microwave plasma-activated chemical vapor deposition (MPCVD). The major topics covered are experimental measurements in situ to diamond CVD reactors, and MPCVD in particular, coupled with models of the gas phase chemical and plasma kinetics to provide insight into the distribution of critical chemical species throughout the reactor, followed by a discussion of the surface chemical process involved in diamond growth.

PubMed Commons home

PubMed Commons

How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for IOP Publishing Ltd.
    Loading ...
    Write to the Help Desk