In this study, the growth of high density single-crystalline ZnO nanowires on patterned ZnO:Ga/SiO(2)/Si templates was reported. We also adsorbed Au nanoparticles onto nanowire surfaces and fabricated ZnO nanowire CO sensors. With 50 ppm CO gas, it was found that we could enhance the device sensitivities at 350 °C from 4.2% to 46.5% by the adsorption of Au nanoparticles. It was also found that measured sensitivities were around 30%, 37%, 46.5% and 53% when concentration of the injected CO gas was 5, 20, 50 and 100 ppm, respectively.