Realization of single-mode telluride rib waveguides for mid-IR applications between 10 and 20 μm

Opt Lett. 2011 Aug 1;36(15):2922-4. doi: 10.1364/OL.36.002922.

Abstract

The feasibility of all-telluride integrated optics devices based on waveguides presenting a single-mode behavior in the spectral range (10-20 μm) is demonstrated. These waveguides are constituted of a several micrometer thick Te(82)Ge(18) film deposited onto a Te(75)Ge(15)Ga(10) bulk glass substrate by thermal coevaporation and further etched by reactive ion etching under the CHF(3)/O(2)/Ar atmosphere. The obtained structures were proven to behave as channel waveguides with a good single-mode transmission over the whole spectral range. These results allowed validating our technological solution for the fabrication of integrated optics modal filters for spatial interferometry.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Electric Impedance
  • Glass / chemistry
  • Infrared Rays*
  • Optical Devices*
  • Tellurium / chemistry*

Substances

  • Tellurium