Display Settings:

Format

Send to:

Choose Destination
See comment in PubMed Commons below
Rev Sci Instrum. 2011 Jun;82(6):063702. doi: 10.1063/1.3596566.

On the implementation of computed laminography using synchrotron radiation.

Author information

  • 1Institut für Synchrotronstrahlung (ISS/ANKA), Karlsruhe Institute of Technology (KIT), D-76128 Karlsruhe, Germany. lukas.helfen@kit.edu

Abstract

Hard x rays from a synchrotron source are used in this implementation of computed laminography for three-dimensional (3D) imaging of flat, laterally extended objects. Due to outstanding properties of synchrotron light, high spatial resolution down to the micrometer scale can be attained, even for specimens having lateral dimensions of several decimeters. Operating either with a monochromatic or with a white synchrotron beam, the method can be optimized to attain high sensitivity or considerable inspection throughput in synchrotron user and small-batch industrial experiments. The article describes the details of experimental setups, alignment procedures, and the underlying reconstruction principles. Imaging of interconnections in flip-chip and wire-bonded devices illustrates the peculiarities of the method compared to its alternatives and demonstrates the wide application potential for the 3D inspection and quality assessment in microsystem technology.

© 2011 American Institute of Physics

PMID:
21721697
[PubMed]
PubMed Commons home

PubMed Commons

0 comments
How to join PubMed Commons

    Supplemental Content

    Full text links

    Icon for American Institute of Physics
    Loading ...
    Write to the Help Desk