Fabrication and electric measurements of nanostructures inside transmission electron microscope

Qing Chen; Lian-Mao Peng

doi:10.1016/j.ultramic.2011.01.043

Fabrication and electric measurements of nanostructures inside transmission electron microscope

Ultramicroscopy. 2011 Jun;111(7):948-54. doi: 10.1016/j.ultramic.2011.01.043. Epub 2011 Feb 4.

Authors

Qing Chen¹, Lian-Mao Peng

Affiliation

¹ Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing 100871, People's Republic of China. qingchen@pku.edu.cn

PMID: 21664554
DOI: 10.1016/j.ultramic.2011.01.043

Abstract

Using manipulation holders specially designed for transmission electron microscope (TEM), nanostructures can be characterized, measured, modified and even fabricated in-situ. In-situ TEM techniques not only enable real-time study of structure-property relationships of materials at atomic scale, but also provide the ability to control and manipulate materials and structures at nanoscale. This review highlights in-situ electric measurements and in-situ fabrication and structure modification using manipulation holder inside TEM.

Publication types

Research Support, Non-U.S. Gov't
Review

MeSH terms

Electricity
Electrons*
Microscopy, Electron, Transmission / methods*
Nanostructures / analysis*
Nanostructures / chemistry*
Nanotechnology / methods*