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Opt Express. 2011 May 9;19(10):9020-6. doi: 10.1364/OE.19.009020.

Electrostatic actuation of silicon optomechanical resonators.

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  • 1OxideMEMS Lab, School of Electrical and Computer Engineering, Cornell University, Ithaca, New York 14853, USA.


Cavity optomechanical systems offer one of the most sensitive methods for detecting mechanical motion using shifts in the optical resonance frequency of the optomechanical resonator. Presently, these systems are used for measuring mechanical thermal noise displacement or mechanical motion actuated by optical forces. Electrostatic capacitive actuation and detection have been shown previously for silicon micro electro mechanical resonators for application in filters and oscillators. Here, we demonstrate monolithic integration of electrostatic capacitive actuation with optical sensing using silicon optomechanical disk resonators and waveguides. The electrically excited mechanical motion is observed as an optical intensity modulation when the input electrical signal is at a frequency of 235 MHz corresponding to the radial vibrational mode of the silicon microdisk.

© 2011 Optical Society of America

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