Display Settings:


Send to:

Choose Destination
See comment in PubMed Commons below
Opt Lett. 2011 Apr 1;36(7):1119-21. doi: 10.1364/OL.36.001119.

Hybrid Si-LiNbO₃ microring electro-optically tunable resonators for active photonic devices.

Author information

  • 1Department of Electrical Engineering, University of Southern California, Los Angeles, California 90007, USA. yooseunl@usc.edu


Hybrid Si-LiNbO₃ electro-optic tunable ring resonators have been proposed and demonstrated as a path to achieving ultracompact and high-speed electro-optic devices. Free standing single crystal LiNbO₃ microplatelets (~mm long and ~1 μm thick) were obtained from a z-cut LiNbO₃ substrate by ion implantation and thermal treatment. The platelets were transferred and thermally bonded on top of Si resonators that were fabricated in a Si-on-insulator platform by a 0.18 μm standard complementary metal-oxide-semiconductor process. For the hybrid microring resonator, a free spectral range of 16.5 nm, a finesse F of ~1.67 × 10², a Q-factor of ~1.68 × 10⁴, and an effective r coefficient of ~1.7 pm/V were achieved for the TE mode. These values are in good agreement with the calculated results.

PubMed Commons home

PubMed Commons

How to join PubMed Commons

    Supplemental Content

    Loading ...
    Write to the Help Desk